基于热释电原理的低电压无磁离子泵性能研究

Research on the Performance of Low-voltage Non-magnetic Ion Pump Based on Pyroelectric Principle

  • 摘要: 随着冷原子惯性传感器、小型真空电子元件等对无磁工作环境有严格要求的设备的发展,现有的真空封装及维持技术难以满足其需求。设计了一种基于热释电原理的低电压无磁离子泵,并开展了原理验证、结构设计、电子轨迹仿真模拟、抽气性能实验研究等工作。以不同尺寸的钽酸锂(LiTaO3)晶体作为离子泵的电压源、电子源,并通过控制加热、冷却时间来控制晶体温度变化。搭建了离子泵样机,验证其抽气特性,实验结果表明,所设计的离子泵在压力10−3 Pa量级真空环境下具有良好的抽气性能,并能够作为辅助泵有效提高分子泵在压力10−6 Pa量级真空环境下的抽气效果。

     

    Abstract: With the development of small high-vacuum devices such as gyroscopes, atomic clocks, cold atomic inertial sensors, and small vacuum electronic components that have strict requirements for low-voltage and non-magnetic working environments, traditional solutions such as vacuum packaging or getter passive vacuum maintenance technology can provide a certain vacuum level for these vacuum electronic devices, but there are still problems such as insufficient vacuum level and high temperature activation, it is generally necessary to incorporate an independent small or micro vacuum pump to achieve vacuum generation and vacuum maintenance for the vacuum chamber system. In this paper, a low-voltage non-magnetic ion pump based on pyroelectric principle is designed, and lithium tantalate (LiTaO3) crystals of different sizes are used as the voltage and electron source to generate the acceleration voltage, suppression voltage and initial emission electrons for the ion pump, and the temperature change of the crystal is controlled by controlling the heating and cooling time, so as to realize the control of the voltage and electronic energy provided by the crystal. In this work, the basic principle verification, ion pump structure design, COMSOL electronic trajectory simulation, pumping performance experimental research and other work were carried out, and the theoretical feasibility of the designed ion pump was verified. The ion pump prototype was built, and its pumping characteristics were verified through experiments. The experimental results showed that the designed ion pump has good pumping performance in a vacuum environment with a pressure of 10-3 Pa. It can be used as an auxiliary pump to effectively improve the pumping effect of the molecular pump in a vacuum environment with a pressure of 10-6 Pa. This work provides a feasible solution for vacuum generation and maintenance of small vacuum systems in low-voltage and non-magnetic environments.

     

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