基于PIC-MCC方法的溅射离子泵抽速计算方法

Calculation Method of Sputtering Ion Pump Pumping Speed Based on PIC-MCC Method

  • 摘要: 基于溅射离子泵潘宁放电单元的实际工作条件,采用PIC-MCC方法建立了相应的仿真模型,并利用开源代码picFoam对单个潘宁放电单元进行了模拟分析。结合仿真结果与现有理论,通过计算离子入射参数,得到了溅射出的钛原子数量,并进一步结合阳极筒参数计算单个潘宁放电单元的抽速和溅射离子泵的整体抽速。分析了不同工作压力下离子的入射位置、入射能量及入射角度的分布规律,计算了单个潘宁放电单元的抽速。最终,基于阳极筒的排列方式得出溅射离子泵的整体抽速,计算结果与理论值对比显示出良好的一致性。

     

    Abstract: Based on the actual operational conditions of the sputtering ion pump's Penning discharge unit, a corresponding simulation model was established by utilizing the PIC-MCC (Particle-In-Cell Monte Carlo Collision) method. The PIC-MCC method is a powerful numerical approach. The Article-In-Cell part enables accurate tracking of charged particles' trajectories in electromagnetic fields, while the Monte Carlo collision part effectively simulates various collision processes between particles, such as elastic and inelastic collisions. After establishing the simulation model using the PIC-MCC method, the open-source code picFoam was employed to perform simulations on a single Penning discharge unit. Through a series of simulations, a large amount of data on ion incident parameters was collected. These parameters included ion velocity, direction, and position.Integrating these simulation results with well-established theoretical frameworks in the field of vacuum physics, the number of sputtered titanium atoms was accurately calculated. Furthermore, by taking into account the geometric and physical parameters of the anode cylinder, which has a significant impact on the electric field distribution and ion movement within the discharge unit, the pumping speed of a single Penning discharge unit and the overall pumping speed of the sputtering ion pump were computed. In addition, a detailed analysis was carried out on the distribution patterns of ion incidence positions, incident energies, and incident angles under different working pressures. These analyses revealed the influence of pressure on the performance of the Penning discharge unit. The results demonstrated that the computed values of the pumping speed of a single Penning discharge unit and the overall pumping speed of the sputtering ion pump were in excellent agreement with the theoretical values. This research not only provides a more in-depth understanding of the sputtering ion pump's working mechanism but also offers practical guidelines for the design and optimization of sputtering ion pumps.

     

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