磁悬浮转子真空计惰性气体校准研究

Study of Calibration of Spinning Rotor Gauge with Inert Gases

  • 摘要: 在半导体制造及空间环境模拟等工业及科研领域中,需采用磁悬浮转子真空计对Ar、Kr、Xe等具有较大分子质量与黏滞系数的惰性气体进行高精度真空压力测量。本研究基于静态膨胀法,对三种不同型号的磁悬浮转子真空计在三种惰性气体环境下的实际切向动量传递系数σeff进行了实验校准,并对测量结果的稳定性进行了分析,对不确定度进行了评定。结果表明,1×10−4~1 Pa压力范围内,SRG-2CE对Kr测量结果的稳定性最好,σeff偏差范围为−0.92%~1.68%;三种不同型号的SRG对Ar、Kr、Xe的σeff校准结果分别为0.992、0.984、0.999;不确定度主要来源于前级压力测量、容积比标定及磁悬浮转子真空计自身测量偏差,高真空范围内相对合成标准不确定度变化范围为3.31%~0.77%。

     

    Abstract: In the industrial and scientific fields, such as semiconductor fabrication and space environment simulation, high-precision vacuum pressure measurement is critically required for inert gases including argon (Ar), krypton (Kr), and xenon (Xe), which are characterized by their relatively high molecular masses and viscosities. The Spinning Rotor Gauge (SRG) is widely employed for such measurements due to its high accuracy and reliability. This study focuses on the experimental calibration of the effective tangential momentum accommodation coefficient (σeff) for three distinct models of spinning rotor gauges (SRGs) under inert conditions, based on the static expansion method—a primary standard technique for vacuum pressure generation. The calibration process was systematically conducted to determine the σeff values, and the stability of the measurement results was thoroughly analyzed. Furthermore, a comprehensive evaluation of the measurement uncertainty was performed. The experimental results indicate that within the pressure range of 1×10−4 Pa to 1 Pa, the SRG-2CE model demonstrates the best measurement stability for krypton (Kr), showing a σeff deviation ranging from −0.92% to 1.68%. The calibrated σeff values obtained from the three different SRG models for Ar, Kr, and Xe are 0.992, 0.984, and 0.999, respectively. These values reflect the gases' interaction with the rotor surface and are crucial for accurate pressure reading conversion. The study identifies that the main sources of measurement uncertainty include inaccuracies in the pre-pressure measurement, uncertainties associated with the calibration of the volume ratio in the expansion system, and inherent deviations of the spinning rotor gauges themselves. In the high-vacuum range, the relative combined standard uncertainty is found to vary between 0.77% and 3.31%, decreasing as pressure increases. This research provides essential calibration data for the application of SRGs for measuring heavy inert gases, thereby enhancing measurement reliability in advanced technological processes where precise vacuum control is imperative.

     

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