宽范围、高精度、批量化复合型真空测试校准装置设计与实现

Design and Implementation of a Wide-range,High-precision,Batch-processed Composite Vacuum Test and Calibration Device

  • 摘要: 设计了一种复合型综合真空校准装置,并对其性能进行了系统测试和分析。该装置由多个真空校准室、流导元件、管路系统、供气系统以及真空获得系统组成,覆盖1×10−8~1×105 Pa的宽真空压力校准范围。装置采用模块化设计,根据不同真空压力区间的特点,分别采用了静态比较法、动态比较法和动态流量法三种校准方法,以满足不同真空计的校准需求。测试中使用了多种类型的真空计进行测试校准,对各个压力校准区间的测量不确定度进行了评定和计算,并且通过传递比较法验证了其在多个校准点上的准确性和一致性。研究结果为宽范围真空校准技术提供了一种高效、高精度的解决方案,可为真空校准技术的研究和应用提供技术支持。

     

    Abstract: During the exploration of spaceflight missions, vacuum sensors directly undertake pivotal tasks including pressure monitoring of the space vacuum environment, vacuum degree regulation inside the vacuum cabin, and vacuum state feedback for propellant delivery. Their performance stability and measurement accuracy directly determine the effectiveness of mission execution and the operational safety of spacecraft. It is necessary to accurately obtain the measurement characteristic parameters of vacuum sensors in space-simulated vacuum environments and verify their performance stability and environmental adaptability under extreme vacuum conditions. Systematic errors and random errors should be eliminated through standardized calibration methods, so as to ensure the accuracy, consistency and traceability of the sensor measurement data. This provides authoritative data support and technical guarantee for the R&D optimization, type selection and adaptation of sensors, as well as their reliable application in spaceflight missions. This paper introduces the design and implementation of a novel integrated composite vacuum calibration device, as well as systematic testing and analysis of its performance. Composed of multiple vacuum calibration chambers, flow conductance components, piping systems, gas supply systems, and vacuum generation systems, the device can cover a wide pressure range of 1×10−8 Pa to 1×105 Pa. Adopting a modular design, the device employs three calibration methods—static comparison method, dynamic comparison method, and dynamic flow method—to meet the calibration requirements of various vacuum gauges according to the characteristics of different pressure ranges. During testing, multiple types of vacuum gauges were used for calibration, and the results demonstrated that the device achieved high precision levels with expanded uncertainties across all pressure ranges. The accuracy and consistency at several key points were verified via transfer comparison methods, demonstrating the device's excellent versatility and stability. The research findings provide an efficient and high-precision solution for wide-range vacuum measurement technology and enable batch calibration capabilities. The successful development of this device fills some gaps in existing vacuum calibration technologies regrding wide-range and high-precision applications, offering significant technical support for related research and industrial applications.

     

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