Abstract: To address the critical requirements of high-precision optical manufacturing, a focused Radio-frequency（RF） ion source has been successfully developed, overcoming significant domestic technological barriers in this advanced field. Leveraging detailed electromagnetic field simulations, the coil structure and magnetic field configuration were meticulously optimized. This led to the adoption of an annular permanent magnet assembly consisting of 12 Alnico (Aluminum-Nickel-Cobalt) magnetic rods in conjunction with the 5-turn coils. This innovative design substantially enhances both the plasma density and its distribution uniformity, establishing a stable and controllable foundation for precise material removal essential in ultra-precision optics fabrication. In parallel, a dedicated control system was developed based on a layered software architecture and the Model-View-ViewModel（MVVM） design pattern. This system integrates four core functional modules—real-time process monitoring, parameter configuration, fault diagnosis, and data management which enables stable closed-loop control over the entire ion beam figuring process. This intelligent control framework ensures high repeatability, operational stability, and minimizes human intervention, which is crucial for achieving consistent machining outcomes. Comprehensive experimental validation confirms the system's outstanding performance. The average ion beam diameter measures 8.37 mm, fully complying with the ≤Φ10 mm design specification. During an extended 8-hour continuous operation test, the system demonstrated remarkable stability, with the fluctuation in volume removal rate recorded at a mere 0.33%, far surpassing the ≤5% performance benchmark. Moreover, the average volume removal rate achieved 9.40×10⁻³ mm³/min, significantly higher than the preset baseline value. Under high-vacuum conditions, the system consistently generated well-defined and highly repeatable removal function spots. These results robustly demonstrate its excellent long-term operational stability and superior machining consistency.In summary, this research provides a robust and reliable technical foundation for high-precision, high-efficiency optical component processing. The successful development of the focused RF ion source, together with the advanced control system, represents a substantial step forward in deterministic optical fabrication technology. The outcomes hold considerable engineering application value, offering a viable and promising solution for the manufacturing of next-generation high-performance optical systems, such as those used in aerospace, astronomy, and advanced lithography.