PVD镀膜设备阴极系统均匀布气结构的仿真与实验优化

Simulation and Experimental Optimization of Uniform Gas Distribution Structure in Cathode System of PVD Film Equipment

  • 摘要: 为了解决工业化PVD镀膜刀具批量生产中因气体分布不均导致的膜层外观色差问题,论文以单管喷嘴型布气管路为研究对象,开展了阴极系统均匀布气结构的设计与实验研究。通过建立三维流体仿真模型,分析了孔距相等与孔距渐变两种布气方式对气体流场分布的影响,并针对孔口束流效应优化了布气结构,使气体出口向下,以增强扩散混合。仿真结果表明,采用等差数列递减的孔距布置可使不同气孔中的气体流速偏差控制在5%以内,改善了气流分布的均匀性。在LIP1400型多弧离子镀设备中进行了TiCN薄膜沉积实验,EDS成分分析显示,采用孔距渐变布气结构后,上、中、下位置刀具试件膜层中C元素含量偏差小于10%,外观颜色由原来的黄褐-玫瑰金-浅黄梯度分布改善为均匀一致的玫瑰金色。研究表明,基于流场仿真优化的渐变孔距布气结构可有效提升PVD镀膜设备轴向沉积的均匀性,方法简便,适于工业化推广。

     

    Abstract: In response to the issue of inconsistent coating appearance caused by uneven gas distribution during the industrial mass production of PVD-coated tools, this study conducted simulation and experimental optimization of a uniform gas distribution structure in the cathode system of PVD coating equipment. Using a single-tube nozzle-type gas distribution pipeline as the research object, a three-dimensional fluid simulation model was established to investigate the effects of two different gas distribution methods—equal hole spacing and gradually varied hole spacing—on the flow field characteristics of the working gas. The results indicate that by adopting a gradually decreasing hole spacing configuration in an arithmetic sequence, the gas flow velocity deviation among the outlets can be controlled within 5%, thereby significantly improving the uniformity of gas distribution. Furthermore, to mitigate the negative effects caused by the orifice jet flow, the structure was optimized by orienting the gas outlets downward, which effectively enhanced gas diffusion and mixing. Experimental validation was carried out using a self-developed LIP1400 multi-arc ion plating system for TiCN coating deposition. EDS analysis revealed that the carbon content deviation in the coatings on tools positioned at the upper, middle, and lower levels of the chamber was less than 10%, while the visual appearance changed from an initial gradient of tan–rose gold–light yellow to a consistent and uniform rose gold color. This study demonstrates that the optimized gradually varied hole spacing structure, based on flow field simulation, can effectively enhance the axial deposition uniformity of PVD coating on tools. The proposed method is straightforward to implement, requiring only modifications to the gas distribution pipeline without the need for complex symmetrical structures or high-precision assembly. It is therefore highly suitable for the technical upgrading of existing equipment and holds significant potential for industrial application.

     

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