Abstract: Electron beam surface modification technique can enable the material to own the excellent surface property,it was widely used in the civil and war industry.This paper reviews the present situation of quality control of coating melted by electron beam in terms of crack control,pore control,surface roughness control and adhesive strength between the coating and substrate,and reviews the influence of electron beam modification on material surface property in terms of oxidation resistance,wearing resistance,corrosion resistance and fracture toughness,the equipment used in electron beam surface modification was introduced,the future of this technique are discussed.