中波红外短波通滤光片的设计与镀制技术研究

DESIGN AND PREPARATION OF MEDIUM-WAVE INFRARED SHORT-WAVELENGTH PASS FILTER

  • 摘要: 研究了中波红外宽光谱短波通滤光片优化设计和镀制,论述了设计该种滤光片的原则和方法。根据等效折射率理论,以周期性对称膜系为基础,使用部分膜层优化方法,设计了中波红外宽光谱短波通滤光片,在2 300~4 700 nm透射波段范围上的平均透射率设计值大于90%,在5 000~6 300 nm截止波段范围上的平均透射率小于1.00%。采用“会聚光红外光学系统”和等离子体辅助沉积工艺实验制备了滤光片。实验表明,在透射波段范围上的平均透射率约为83%,截止波段的平均透射率约为0.45%。结果表明,部分膜层优化方法设计的膜系,膜层结构简单,有利于膜层厚度的监控。

     

    Abstract: In this paper,optimization design and preparation of the medium-wave infrared broad-band short-wavelength pass filter was investigated,and design principles and methods was discussed.The equivalent-index method was used to design the filter and thicknesses of some chosen films were optimized.The short-wavelength pass filter in medium-wave infrared band was designed,which shows an average transmittance ratio is more than 90% at wavelength region 2300~4700nm and an average transmittance ratio is less than 1.00% at 5000~6300nm.The filter was prepared successfully by using a convergent infrared optical system and a plasma assistant deposition technology.The result shows that make use of the method of optimizing some chosen films,the film system is simplified and it is convenient to monitor the film thickness.

     

/

返回文章
返回