超高真空下小型四极质谱计的性能研究

PERFORMANCE STUDY OF A MINIATURE QUADRUPOLE MASS SPECTROMETER IN ULTRA-HIGH VACUUM

摘要: 在超高真空下对QMS200小型四极质谱计进行了实验研究。实验通过调节离子源的发射电流、聚焦电压和场轴电压,测量了质谱计灵敏度、线性以及图样系数的相应变化。实验结果表明,不同的参数设置对质谱计性能有不同的影响。文章结论对四极质谱计应用具有一定的参考价值。

Abstract: Influence of various ion source parameters,such as emission current,focus voltage,and field axis voltage,on the sensitivity,linearity and cracking patterns of the miniature quadrupole mass spectrometer（QMS）,model QMS200,was experimentally studied in ultra-high vacuum.The results show that different parameters results in different influence.The conclusion has some reference on QMS application.