几种热阴极电离真空计电参数校准及分析

SEVERAL HOT CATHODE IONIZATION VACUUM GAUGE CALIBRATION AND ANALYSIS OF ELECTRICAL PARAMETERS

  • 摘要: 通过真空比对标准装置及电参数测量系统,对目前较为常用的ZJ-27,ZJ-12,ZJ-10,ZJ-2等四种热阴极电离真空计进行电参数校准。通过对实验数据的分析,验证了该套装置及方法校准热阴极电离真空计电参数的可行性。

     

    Abstract: This article through the vacuum comparison standard device and electric parameter measuring system,on some kinds of hot cathode ionization vacuum gauge calibration of electrical parameters.Based on the analysis of experimental data,the validation of the set of device and the feasibility of the method

     

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