温度对电容薄膜真空计测量影响的实验研究

THE TEMPERATURE INFLUENCE OF CAPACITANCE DIAPHRAGM GAUGE MEASURING ACCURACY

摘要: 采用了一支满量程为1 333 Pa的绝压式电容薄膜真空计,在金属膨胀式真空标准装置上对其进行温度变化的影响实验研究,包括在开和未开控制单元的规管恒温和温度补偿功能两种情况下环境温度变化的实验,并在实验过程中记录了电容薄膜真空计的零点漂移情况。其中,在打开控制单元的规管恒温和温度补偿功能的条件下,电容薄膜真空计测量准确度非常好。而在未打开控制单元的规管恒温和温度补偿功能的条件下,在10^-2～10^-1Pa两个量级上电容薄膜真空计的示值与标准值有较大偏差,最大偏差为36%;而在1～10²Pa量级上电容薄膜真空计测量准确度也非常好。

Abstract: The experiment was performed on the static expansion vacuum standard by using a 1 333 Pa full-scale ACDG on this two circumstances: first,turn on the gauge heat and temperature compensation function of control module. Second,turn off. And also zero drift was recorded during the experiment. Finally,on the first circumstance,we founded that the measuring accuracy is quite well. And on the second circumstance,the measuring accuracy is also quite well at 10^-210^-1Pa,and it has deviation at 1~10²Pa and maximum is 36%.