火星探测小型电容薄膜真空计的性能研究

STUDY ON METROLOGICAL CHARACTERISTIC OF MINIATURE CAPACITANCE DIAPHRAGM VACUUM GAUGE FOR MARS EXPLORATION

摘要: 目前在用电容薄膜真空计存在体积大、重量重等问题，无法满足深空探测中真空测量需求，因此设计了一种具有外形尺寸小、重量轻、工作温度范围宽等特点的小型电容薄膜真空计。在已经建立的金属膨胀式真空标准装置上对小型电容薄膜真空计的线性、稳定性、重复性等各项性能进行了反复的实验研究。实验结果表明，小型电容薄膜真空计具有良好的线性，重复性和稳定性的计算结果均能满足火星探测要求。

Abstract: Commercial capacitance diaphragm vacuum gauge cannot meet the requirement for vacuum measurement in deep space exploration.The miniature capacitance diaphragm gauge has been designed.The linearity、stability and repeatability of miniature capacitance diaphragm vacuum gauge has been studied on the static expansion vacuum standard equipment.The results show that the metrological characteristic of the miniature capacitance diaphragm gauge can meet the mars exploration needs.