董猛, 冯焱, 成永军, 等. 材料在真空环境下放气的测试技术研究[J]. 真空与低温, 2014, 20(1): 46-51. DOI: 10.3969/j.issn.1006-7086.2014.01.010
引用本文: 董猛, 冯焱, 成永军, 等. 材料在真空环境下放气的测试技术研究[J]. 真空与低温, 2014, 20(1): 46-51. DOI: 10.3969/j.issn.1006-7086.2014.01.010
DONG Meng, FENG Yan, CHENG Yong-jun, et al. MEASUREMENT STUDY FOR VACUUM MATERIALS OUTGASSING[J]. VACUUM AND CRYOGENICS, 2014, 20(1): 46-51. DOI: 10.3969/j.issn.1006-7086.2014.01.010
Citation: DONG Meng, FENG Yan, CHENG Yong-jun, et al. MEASUREMENT STUDY FOR VACUUM MATERIALS OUTGASSING[J]. VACUUM AND CRYOGENICS, 2014, 20(1): 46-51. DOI: 10.3969/j.issn.1006-7086.2014.01.010

材料在真空环境下放气的测试技术研究

MEASUREMENT STUDY FOR VACUUM MATERIALS OUTGASSING

  • 摘要: 在真空材料放气率测试装置上对金属材料的放气特性进行了实验研究,实验采用的方法为静态升压法、固定流导法、双通道气路转换法。实验结果表明,测试装置的极限真空度为9.2×10-9Pa,铜、铝合金2A12、304不锈钢三种材料半小时后的放气率分别为2.34×10-8Pa·m3·s-1·cm-2、1.83×10-9Pa·m3·s-1·cm-2、8.48×10-11Pa·m3·s-1·cm-2。利用四极质谱计测得装置的本底气体成分主要有H2、N2/CO、H2O和CO2,材料放出的气体成分主要有N2/CO、H2O。三种方法测试得到的铜金属材料的放气率随着温度的升高而不断增大。

     

    Abstract: The experiment for metal materials outgassing rates property was performed on the vacuum material outgassing rate apparatus. The constant volume method, the orifice throughput method and switching between two pumping paths (SPP) method were adopted for the experiment study. The results show that the ultimate pressure of apparatus is 9. 2×10-9 Pa. After half hour, the outgassing rate of copper, allium alloy and 304 stainless steel is 2. 34×10-8 Pa·m3·s-1·cm-2, 1. 83×10-9 Pa·m3·s-1·cm-2、8. 48×10-11 Pa·m3·s-1·cm-2, respectively. The background gas species of apparatus by quadruple mass-spectrometer are H2, N2/CO, H2O and CO2. The materials outgassing species are mainly N2/CO and H2O. Additionally, the copper outgassing rate measured by three methods increases with elevated temperature.

     

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