碳纳米管电子源制备及真空测量中的应用研究

FABRICATION OF CARBON NANOTUBE EMITTER AND ITS APPLICATION IN VACUUM MEASUREMENT

摘要: 在调研碳纳米管电子源制备技术基础上，主要介绍了用于真空测量的两种碳纳米管电子源结构，分别对其制备工艺及在真空测量中的应用进行了叙述，并对碳纳米管电子源新结构和新工艺的进展进行介绍和总结，对碳纳米管电子源制备及其在未来真空测量中的应用前景提出设想。

Abstract: Based on the comprehensive investigation for carbon nanotube emitter,two kinds of emitters are introduced and their preparation methods and applications in vacuum measurements are summarized.Meanwhile,the progress in new structures and new techniques of the emitters are reviewed.Finally,some ideas for the preparations and applications of carbon nanotube emitters in vacuum measurements are proposed.