Abstract: With the progress of science and technology,all kinds of vacuum sensor is widely used in the vacuum measuring equipment.The related measurement departments pay more and more attention to its routine measurement and calibration problem.Through the analysis of the principle of the vacuum piezoresistive vacuum sensor,use the comparison method of vacuum calibration device to obtain the function relation between the pressure variables and output signal,judgment measurement results and the measures degree of truth value consensus,the problem of measurement and traxeability of the sensor is solved.