Abstract: The theory study of film thickness distribution deposited on inverted conical surface with the evaporation source directly below the substrate is reported. The film thickness on every position of the cone and the film thickness uniformity of the cone can be received by calculation under different geometric configuration. The results show when the evaporation source is point source or small plane source and conical surface shape is fixed， the film thickness uniformity of cone becomes better as the distance of evaporation source and central of the cone bottom. And when the evaporation source is fixed， the increase of cone bottom radius results to film thickness uniformity of cone becomes worse. Under the same configuration， the thickness uniformity of cone with small plane source is worse than point source.