欧阳莹雪, 章黎, 何慧, 等. FePtAg-C纳米颗粒薄膜的制备及表征[J]. 真空与低温, 2014, 20(6): 360-363. DOI: 10.3969/j.issn.1006-7086.2014.06.013
引用本文: 欧阳莹雪, 章黎, 何慧, 等. FePtAg-C纳米颗粒薄膜的制备及表征[J]. 真空与低温, 2014, 20(6): 360-363. DOI: 10.3969/j.issn.1006-7086.2014.06.013
OUYANG Ying-xue, ZHANG Li, HE Hui, et al. FABRICATION AND CHARACTERIZATION OF FePtAg-C NANOGRANULAR THIN FILMS[J]. VACUUM AND CRYOGENICS, 2014, 20(6): 360-363. DOI: 10.3969/j.issn.1006-7086.2014.06.013
Citation: OUYANG Ying-xue, ZHANG Li, HE Hui, et al. FABRICATION AND CHARACTERIZATION OF FePtAg-C NANOGRANULAR THIN FILMS[J]. VACUUM AND CRYOGENICS, 2014, 20(6): 360-363. DOI: 10.3969/j.issn.1006-7086.2014.06.013

FePtAg-C纳米颗粒薄膜的制备及表征

FABRICATION AND CHARACTERIZATION OF FePtAg-C NANOGRANULAR THIN FILMS

  • 摘要: 采用磁控溅射法在硅基片上生长FePt纳米颗粒薄膜。在硅片表面生长MgO籽层用来引发FePt合金薄膜的fct织构,加入C来减小其颗粒尺寸,加入Ag来增强其L10有序度。采用X射线衍射仪(XRD)、超导量子干涉仪(SQUID)和高分辨率透射电镜(TEM)对FePt薄膜进行表征。结果表明制备的薄膜样品具有优良的L10相结构,其M-H曲线表明方形度很好,垂直矫顽力HC有2 467 kA/m,颗粒大小为10.4 nm。该薄膜非常适合用做下一代高密度磁存储媒质,可有效提高信息存储密度。

     

    Abstract: We fabricated FePtAg-C granular thin film on a bare silicon substrate by magnetron sputtering method. A MgO interlayer was grown on the substrate to induce the L10 order in the FePt alloy film. The addition of carbon can reduce the grain size of FePt, and the addition of Ag can help enhance the L10 order in the FePt film in a relatively low temperature. Then we applied XRD, SQUID and high-resolution TEM to measure its texture, magnetic properties, and microstructures, respectively. Results show that the FePt film has excellent L10 order, and the squareness of M-H loop is close to 1 , with a high perpendicular coercivity of 2 467 kA/m. The microstructure shows that it has small grain size of 10.4 nm with uniform distribution. This magnetic FePt film is a promising candidate for perpendicular magnetic recording media with high density.

     

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