Abstract:
The optical properties of TiO
2thin film deposited by electron beam evaporation with different oxygen flux were studied.When the oxygen flux from 37.4×10
-3Pa·m
3·s
-1to 61.2×10
-3Pa·m
3·s
-1,vacuum degree was rising from 1.4×10
-3Pa to 2.5×10
-3Pa,the different optical properties will gain from TiO
2thin film.Spectrophotometer was used to test spectrum,when the vacuum degree decreased,it was found that peak value transmittance of TiO
2has increased.The refractive index and extinction coefficient increased first and then decreased.Under vacuum degree of 2.0×10
-3Pa,the best TiO
2thin film quality,the peak value transmittance was 92%,the refractive index changed from 2.50 to 2.20.The extinction coefficient was below 10
-4.By-use Cauchy chromatic dispersion formula.The fitting curve accorded well with the result by the envelope method.Refractive index changing with the wavelength formula is
n(λ)=2.17+6.12×10
4/λ
2+2.98×10
8/λ
4.