Abstract: For the surface coating is large size glass panel,and in the case of deposition environment is high temperature,the traditional clip clamping method is not applicable.In this paper,a new way has been provided and a new fixture has been disigned to solve this problem.Using the diffrent characteristics of glass substrate and metal material thermal expansion coefficient,the fixture has been disigned by alumiunm alloy and heat resistant combinational steel,and it counteracted deformation caused by high temperature.Inverse side of the glass substrate was used to support the glass.