Abstract: Nanocrystalline diamond has more superior properties than normal diamond,which makes many researchers devote themselves to it.Chemical vapor deposition(CVD)is a mature method of fabrication of nanocrystalline diamond.The growth mechanism of nanocrystalline diamond thin film is explained briefly in this review.Two types of fabrication methods and their advantages are introduced.It discussed the recent development of nanocrystalline diamond in quality,scale and growth rate with these two methods and future research from different directions.