Abstract: The particulate contamination on metal surface is one of the factors which affect the high-power laser system operating environment。In order to quantify the cleanliness level of metal structure after cleanout,installation and work,it need efficiently sampling,testing method and sampling device.This paper firstly introduced tape sampling method and microvacuum sampling method and devices,then carried out the experimental studies.Experimental results showed that two sampling methods could collected particles as small as 1μm.Moreover,the methods were simple,practical,and could meet needs of practical engineering.