Abstract: Single crystal diamond is one of the most potential materials in the high-tech fields due to its superior physical and chemical properties. Firstly,the growth technologies of CVD single crystal diamond are generally explained, Then a particular discussion was made on the process of MPCVD single crystal diamond such as the substrate selection, pretreatment and deposition parameters. Finally the ultra-precision cutting tools, optical field, particle detectors, high temperature semiconductor and electronic devices have been introduced, the prospects of single crystal diamond were also proposed.