张朝科, 冯煜东, 王志民, 等. 金属/氧化物界面结合特性的研究现状[J]. 真空与低温, 2015, 21(4): 187-193. DOI: 10.3969/j.issn.1006-7086.2015.04.001
引用本文: 张朝科, 冯煜东, 王志民, 等. 金属/氧化物界面结合特性的研究现状[J]. 真空与低温, 2015, 21(4): 187-193. DOI: 10.3969/j.issn.1006-7086.2015.04.001
ZHANG Zhao-ke, FENG Yu-dong, WANG Zhi-min, et al. RESEARCH STATUS AND DEVELOPMENT ON INTERFACE BONDING PROPERTY OF METAL/OXIDE[J]. VACUUM AND CRYOGENICS, 2015, 21(4): 187-193. DOI: 10.3969/j.issn.1006-7086.2015.04.001
Citation: ZHANG Zhao-ke, FENG Yu-dong, WANG Zhi-min, et al. RESEARCH STATUS AND DEVELOPMENT ON INTERFACE BONDING PROPERTY OF METAL/OXIDE[J]. VACUUM AND CRYOGENICS, 2015, 21(4): 187-193. DOI: 10.3969/j.issn.1006-7086.2015.04.001

金属/氧化物界面结合特性的研究现状

RESEARCH STATUS AND DEVELOPMENT ON INTERFACE BONDING PROPERTY OF METAL/OXIDE

  • 摘要: 金属/氧化物薄膜材料具有优良的物理化学特性,近年来得到了人们的广泛关注和研究。但是,金属/氧化物材料的界面复杂性一直是困扰科研人员的难题。界面结构对材料性能有着重大的影响。分析了氧、缺陷、过渡金属等对金属/氧化物界面的影响,着重讨论了界面结构与特性及对附着性的影响及提升附着性的方法。结果表明,氧的含量及分布、过渡金属中间层、表面电子密度差、离子束辅助沉积、后期处理等对薄膜界面结合特性都有重要影响。

     

    Abstract: Metal/oxide has been paid more attention in recent years for its remarkable properties. However, it is hard to study because of the complicated interface of metal/oxide. We review the progresses in the studies on the structural, cohesive aspects of interfaces in metal/alumina, and the progresses in adhesion of metal/oxide interfaces are discussed emphatically. Finally, a summary and outlook for the interface is proposed. The result shows that oxygen content and distribution, transition metal intermediate layer, surface electron density difference, ion beam assisted depositing, post processing, etc. will play important roles in interface binding properties of metal/oxide.

     

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