碳纳米管阴极电离真空计研制及其性能研究

THE FABRICATION AND RESEARCH OF IONIZATION GAUGE BASED ON CARBON NANOTUBE CATHODE

摘要: 碳纳米管阴极电离真空计在超高/极高真空测量中具有广阔应用前景，基于碳纳米管阴极研制了测量范围10^-9~10^-4 Pa的电离真空计，真空规管包括了碳纳米管阴极、门极、阳极、反射极和收集极，电路控制系统由高压电源、微弱离子流测量和控制电路组成。实验研究结果表明，不锈钢衬底上直接生长制备的碳纳米管阴极性能良好，开启场强和阈值场强分别为1.9 V/µm和3.9 V/µm，当阳极电流为42 µA时，碳纳米管阴极电离真空计本底干扰可降低到1.81×10^-9 Pa。

Abstract: The ionization gauge based on carbon nanotube(CNT)cathode has a broad application prospect in ultrahigh and extreme high vacuum measurement. The gauge which can measure the pressure from 10^-9 Pa to 10^-4 Pa has been developed. The gauge consists of CNT cathode, gate, anode, reflector and collector. And the electric controller is composed of high voltage power, weak current transmission and control circuits. The experimental results show that the CNT nanotube cathode prepared on the stainless steel substrate has shown a good performance. The turn on and threshold electric fields for CNT array grown on stainless steel substrate were 1.9 V/µm and 3.9 V/µm respectively. The residual current of the gauge can be reduced to 1.81×10^-9 Pa while the anode current is 42 µA.