Abstract: This paper presented the alignment and monitoring of cryomodule，calculated and verified the vacuum and cry-deformation and displacement firstly.As the heat conduction and expansion coefficient are both smaller，fiber glass（G11）was chosen as cry-monitoring target after the finite element simulation.And fiber glass（G11）can control its own cry-deformation within 0.1 mm.The novel solution adopted was collaborative alignment based on multi-laser tracker or portable coordinate measurement machine.The solution improved the installation efficiency by 70%，and doubled the installation precision of existing cryomodule.As the deformation and displacement is beyond the telescope range（±1.2 mm），the dial indicator was used to reduce the uncertainty error to 0.01 mm.The above results greatly improve the efficiency of installation and the accuracy of monitoring in low temperature，guarantee the success of 25 MeV CW proton beam.