新型MEMS电容真空传感器的设计及其分析

Design and Analysis of a New Type MEMS Capacitance Vacuum Pressure Sensor

摘要: 为了延伸MEMS电容式真空传感器测量范围、提高抗过载能力，设计了一种新型岛状结构下电极。利用有限元方法分析该结构与传统结构真空传感器的压力-挠度、压力-电容、压力-薄膜应力关系。研究发现，与传统结构相比，新型结构真空传感器的低压灵敏度更高、线性输出性能更好、抗过载能力更强，可为MEMS电容式真空传感器研制提供参考。

Abstract: In order to stretch measurement range and enhance the anti-overload capacity of MEMS capacitive vacuum sensor,a new island-like bottom electrode has been designed.Using finite element analysis (FEA) method to compare the relationship between pressure and deflection,pressure and capacitance,pressure and maximum stress,respectively.This new-type electrode has superb sensitivity in low pressure,better linearity and stronger anti-overload than normal structure,which could donate some references for the following manufacture process of MEMS vacuum sensor.