不同流率下空心阴极内中性气体压力测试研究

Study on Neutral Gas Pressure Test in Hollow Cathode at Different Flow Rates

摘要: 空心阴极为热电子发射电真空器件，其加热方式与空心阴极内部气体压力密切相关。以研制的LHC-5型空心阴极为研究对象，对非工作状态下的空心阴极入口气压进行了测试。实验结果表明：空心阴极入口气压随通入的气体流率的增大而增大；室温下，当通入的氙气流率不大于0.68 mg/s时，空心阴极入口气压在1 000 Pa以下；当通入氙气流率为0.136 mg/s时，空心阴极入口气压约为165 Pa，对应的中性气体密度约为4.0×10²²m^-3。

Abstract: The hollow cathode is a thermal electron emission electric vacuum device.The heating method is closely related to the gas pressure inside the hollow cathode.This paper takes the LHC-5 hollow cathode as the research object, and tested its inlet gas pressure on non-working status.The results showed that:the inlet gas pressure of the hollow cathode increases with the increase of flow rate of the incoming gas;at room temperature, when the implied flow rate of the inlet is not more than 0.68 mg/s, the inlet pressure of the hollow cathode is below 1 000 Pa.when flow rate is 0.136 mg/s, the inlet pressure of the hollow cathode is about 165 Pa and the neutral gas density is about 4.0×10²²m^-3.