李毅, 李得天, 王多书. 冷原子量子真空计量技术研究进展[J]. 真空与低温, 2019, 25(3): 145-155. DOI: 10.3969/j.issn.1006-7086.2019.03.001
引用本文: 李毅, 李得天, 王多书. 冷原子量子真空计量技术研究进展[J]. 真空与低温, 2019, 25(3): 145-155. DOI: 10.3969/j.issn.1006-7086.2019.03.001
LI Yi, LI Detian, WANG Duoshu. Research Progress of Cold Atom Quantum-based Vacuum Metrology[J]. VACUUM AND CRYOGENICS, 2019, 25(3): 145-155. DOI: 10.3969/j.issn.1006-7086.2019.03.001
Citation: LI Yi, LI Detian, WANG Duoshu. Research Progress of Cold Atom Quantum-based Vacuum Metrology[J]. VACUUM AND CRYOGENICS, 2019, 25(3): 145-155. DOI: 10.3969/j.issn.1006-7086.2019.03.001

冷原子量子真空计量技术研究进展

Research Progress of Cold Atom Quantum-based Vacuum Metrology

  • 摘要: 超高/极高真空度测量技术在宇航科学、半导体制造、表面科学等领域具有广泛的应用。随着超冷原子技术的发展,利用冷原子损失率与气体压力之间的关系测量真空度,逐渐发展成一种新的真空测量方法——冷原子量子真空测量。在该方法中,冷原子损失率仅仅与冷原子和气体的碰撞截面有关,因此基于冷原子量子真空测量的方法有望发展出绝对真空计量技术。首先介绍了激光冷却和囚禁原子的基本概念以及磁光阱的结构和工作原理。其次,论述了冷原子量子真空计量技术的国内外研究现状、技术优势和关键技术。最后展望了冷原子量子真空计量技术的发展趋势。随着冷原子装置的小型化、商业化、普及化,这种新型量子真空计量技术有望应用到诸如航天器等需要高性能、轻量化、微型化装置的领域中。

     

    Abstract: Ultra-high vacuum and extreme-high vacuum(UHV/XHV) measurements have a wide range of applications in aerospace science,semiconductor manufacturing,surface science and so on.With the development of cold atom technology,cold atom quantum-based vacuum metrology(CAVM) based on cold atom loss rate has great potential to become a new metrology technology.In this method,the measurement of cold atom loss rate depends only on collision cross section between cold atoms and gases.The CAVM will be an absolute vacuum sensor.In this paper,the basic concepts of laser cooling and trapped atom are briefly described,and the structure and working principle of magneto-optical trap are introduced.Furthermore,the research development of CAVM is investigated.The advantages and key technologies of this technique are analyzed and summarized.Finally,the developing trend of CAVM is prospected.With the miniaturization,commercialization and popularization of cold atom devices,CAVM is expected to be applied to the fields of high-performance,lightweight and miniaturized devices such as spacecraft.

     

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