甘婧, 王永健, 王旭迪. 基于动态差压法的分子流流导测量[J]. 真空与低温, 2019, 25(4): 265-269. DOI: 10.3969/j.issn.1006-7086.2019.04.009
引用本文: 甘婧, 王永健, 王旭迪. 基于动态差压法的分子流流导测量[J]. 真空与低温, 2019, 25(4): 265-269. DOI: 10.3969/j.issn.1006-7086.2019.04.009
GAN Jing, WANG Yongjian, WANG Xudi. Mesurement of Molecular Flow Conductance Based on Dynamic Differential Pressure Attenuation Method[J]. VACUUM AND CRYOGENICS, 2019, 25(4): 265-269. DOI: 10.3969/j.issn.1006-7086.2019.04.009
Citation: GAN Jing, WANG Yongjian, WANG Xudi. Mesurement of Molecular Flow Conductance Based on Dynamic Differential Pressure Attenuation Method[J]. VACUUM AND CRYOGENICS, 2019, 25(4): 265-269. DOI: 10.3969/j.issn.1006-7086.2019.04.009

基于动态差压法的分子流流导测量

Mesurement of Molecular Flow Conductance Based on Dynamic Differential Pressure Attenuation Method

  • 摘要: 提出一种基于动态差压法测量固定流导元件流导的新方法。固定流导元件是以阳极多孔氧化铝(AAO)为模板制作而成。在测量流导过程中,通过测量连接AAO固定流导元件两端的容器的动态差压变化关系,运用最小二乘法对实验数据进行指数函数拟合,计算出AAO固定流导元件的流导值。分别以氮气、氦气和氩气作为实验气体对AAO固定流导元件的流导进行了测量。结果表明,在大气压力以下,AAO固定流导元件的流导不随入口压力变化而变化,始终保持恒定。对He、起始压力为30 kPa、初始压差为1.97 kPa、测量时间为60 s的测试点进行了不确定度评定,其相对合成标准不确定度为13%。对评定过程进行分析,发现测量点的不确定度随测量时间的增加急剧增大。该流导测量装置的测量范围为1×10-4~1×10-7m3/s,此方法具有操作简便、结果精确等优点。

     

    Abstract: In this paper,a new technique to measure the conductance based on dynamic differential pressure method is introduced.The constant conductance element is made of anodic porous alumina(AAO)as template.AAO was used to connect two vary pressure containers,the conductance can be measured by monitoring pressure attenuation and least square function fitting method.This experiment has researched gas conductance of nitrogen,helium and argon respectively.As the result,AAO has a constant flow conductance under a standard atmosphere pressure,and it doesn't change with the inlet pressure.The test points of Helium,starting pressure of 30 000 Pa,initial pressure difference of 1 297 Pa and measurement time 60 s were evaluated for uncertainty,and the relative synthetic standard uncertainty was 13%.Through analysis of the evaluation process,it was found that the uncertainty of measurement points increased sharply with the increase of measurement time.The measuring range of the conductance measurement system is 1×10-4~1×10-7m3/s,and the conductance measurement system has simple and precise characteristics.

     

/

返回文章
返回