Abstract: Aiming on the problems of small effects area and uneven effects of energy action,and poor accessibility performance in special positions in the process of material modification by electron-beam.A large-area and uniform-deposit beam waveform is designed and a special technological equipment of travel path control is developed.Through the modification process test of the inner and outer surface of the plate and rotary specimen,the energy homogenization deposition effect and the feasibility of path control are verified.The results show that,the worked efficiency is fold increased and the accessibility is extended,and the modification thickness is equal.