CSNS直线加速器真空系统及四极质谱检漏

Csns Linac Vacuum System and Quadrupole Mass Spectrometry Leak Detection

摘要: 介绍了中国散裂中子源（CSNS）直线加速器真空系统的组成和抽气系统的设计。利用氦质谱检漏仪和四极质谱计两种手段对RFQ腔进行检漏，通过对施加示漏介质前后RFQ腔内残余气体成分曲线分析、对比压力变化曲线等，确定了漏点位置。排除泄漏故障后，RFQ腔很快获得了10^-6Pa的真空，满足了直线加速器对真空度的要求。

Abstract: The composition and design of vacuum system of China Spallation Neutron Source(CSNS) linear accelerator are introduced.The leakage of Radio Frequency Quadrupole(RFQ) cavity was detected by helium mass spectrometer and quadrupole mass spectrometer.The leakage point was determined by analyzing the residual gas composition curves and comparing the pressure change curves of RFQ cavity before and after the leakage medium was applied.And then the RFQ cavity quickly obtained the pressure of 10^-6Pa after eliminating leakage,which met the requirements of the linear accelerator for pressure.