差压式MEMS电容薄膜真空规的设计与测试

李刚, 韩晓东, 李得天, 等. 差压式MEMS电容薄膜真空规的设计与测试[J]. 真空与低温, 2020, 26(1): 17-20. DOI: 10.3969/j.issn.1006-7086.2020.01.002

引用本文:

李刚, 韩晓东, 李得天, 等. 差压式MEMS电容薄膜真空规的设计与测试[J]. 真空与低温, 2020, 26(1): 17-20. DOI: 10.3969/j.issn.1006-7086.2020.01.002

LI Gang, HAN Xiaodong, LI Detian, et al. Design and Test of Differential MEMS Capacitance Diaphragm Gauge[J]. VACUUM AND CRYOGENICS, 2020, 26(1): 17-20. DOI: 10.3969/j.issn.1006-7086.2020.01.002

Citation:

LI Gang, HAN Xiaodong, LI Detian, et al. Design and Test of Differential MEMS Capacitance Diaphragm Gauge[J]. VACUUM AND CRYOGENICS, 2020, 26(1): 17-20. DOI: 10.3969/j.issn.1006-7086.2020.01.002

差压式MEMS电容薄膜真空规的设计与测试

Design and Test of Differential MEMS Capacitance Diaphragm Gauge

摘要: 差压式MEMS电容薄膜真空规的设计与测试

Abstract: A scheme of Capacitance Diaphragm Gauge (CDG) based on MEMS technology was proposed. The simulation model was established using finite element analysis software, and the size of the diaphragm and the distance between electrodes were optimized. According to the optimization results, a differential CDG was developed, and its performance was tested. Results show that the measurement range covers from 5 Pa to 1 000 Pa, the sensitivity is better than 10fF/Pa, and the test curve is piecewise linear.

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