阴极电弧离子镀膜技术的进步

Advances in Cathode Arc Ion Plating Technology

摘要: 阴极电弧离子镀膜技术是国内外沉积工模具硬质膜层的主要技术。在高新技术产品和高端制造业需求的推动下，阴极电弧离子镀膜技术得到了长足的进步。本文介绍了阴极电弧离子镀膜技术的原理和特点，重点分析了阴极电弧源、硬质膜层性能和工件清洗技术等方面的进展，并对未来的发展进行了展望。

Abstract: The technology of cathode arc ion plating is the main technology of hard coating for deposition tools.With the development of high-tech products and high-end manufacturing industry,cathode arc ion plating technology has been developed.The principle,characteristics and technical progress of various new cathode arc ion plating technologies are introduced.And the future development is prospected.