智能节能窗用二氧化钒薄膜磁控溅射技术研究

Study on Magnetron Sputtering Technology of Vanadium Dioxide Thin Film for Smart Energy Efficient Window

摘要: 二氧化钒是一种在68℃附近具有金属-绝缘体可逆相变的新颖材料，相变前后对红外光分别呈现出高透与高反的特性，是智能节能窗的理想材料。文章针对应用于智能节能窗二氧化钒薄膜磁控溅射中存在的主要问题，综述了近年来该领域发展的一些新技术，特别是本研究组在基底上加偏置电压降低沉积温度、离子后处理提高可见光透射率、超薄层掺杂降低相变温度等方面的工作进展。

Abstract: Vanadium dioxide is a novel material with reversible metal-insulator phase transition near 68 ℃,which has the characteristics of high transmittance or high reflection in infrared range before and after phase transition,respectively.It is an ideal material for smart energy-efficient window.In view of the main problems existing in the magnetron sputtering of vanadium dioxide thin films for smart window applications.New technologies used in this field in recent years are summarized this paper,especially for the works progress in our group,such as applying bias voltage on the substrate to reduce deposition temperature,ion post-treatment to improve the visible transmittance,ultra-thin layer doping to reduce the phase transition temperature,etc.