Abstract: Tetrahedral amorphous carbon film was prepared by using independently developed laser-induced arc magnetic filtered vacuum cathode arc deposition equipment at different workbench rotating speeds,and the deposition rate was adjusted by changing the workbench rotating speed.The effect of the deposition rate on the structural properties of the tetrahedral amorphous carbon film was discussed.The results showed that as the deposition rate increased,the hardness and elastic modulus of the tetrahedral amorphous carbon film increase first and then decreased with the change of sp³bond content,the maximum values were 48 GPa and 300 GPa,respectively.The friction coefficient of the film was not greatly affected by the deposition rate,which was about 0.14.The wear rate of the film gradually decreased with the increase of the deposition rate,and the minimum was 6×10^-16m³/(N·m).This result showed that adjusting the deposition rate within a certain range can effectively improve the mechanical properties and wear resistance of the tetrahedral amorphous carbon film.