肖汉武, 蒋玉齐. 关于氦质谱检漏固定方法的几点讨论[J]. 真空与低温, 2020, 26(6): 442-448. DOI: 10.3969/j.issn.1006-7086.2020.06.003
引用本文: 肖汉武, 蒋玉齐. 关于氦质谱检漏固定方法的几点讨论[J]. 真空与低温, 2020, 26(6): 442-448. DOI: 10.3969/j.issn.1006-7086.2020.06.003
XIAO Hanwu, JIANG Yuqi. Some Discussions on the Fixed Methods in Helium Mass Spectrum Leak Testing[J]. VACUUM AND CRYOGENICS, 2020, 26(6): 442-448. DOI: 10.3969/j.issn.1006-7086.2020.06.003
Citation: XIAO Hanwu, JIANG Yuqi. Some Discussions on the Fixed Methods in Helium Mass Spectrum Leak Testing[J]. VACUUM AND CRYOGENICS, 2020, 26(6): 442-448. DOI: 10.3969/j.issn.1006-7086.2020.06.003

关于氦质谱检漏固定方法的几点讨论

Some Discussions on the Fixed Methods in Helium Mass Spectrum Leak Testing

  • 摘要: GJB548B-2005方法1014.2密封试验中的固定方法根据器件内腔体积划分5档体积范围,由于划分不够细致,对于某些内腔体积,其拒收极限值R1所对应的等效标准漏率L存在偏松问题,因此对于部分微小漏率器件存在漏检的风险。此外固定方法中的最小加压压力310 kPa对于大尺寸陶瓷封装而言,有可能导致盖板凹陷、密封损伤等问题。本文分析了现有标准中固定方法和灵活方法的等效标准漏率差异以及大尺寸腔体的加压问题,提出了降压检漏建议。

     

    Abstract: The fixed methods of leak testing in testing method 1014.2 “Seal” from GJB 548B-2005 standards,divide the internal free volume of sealed packages into 5 ranges,each with a given condition for helium bombing and a corresponding reject limit R1for the measured leak rate.As this ranges dividing is not sufficient,for some given internal free volume of sealed packages,the equivalent standard leak rate L is lenient with respect to that for the flexible methods,which is subject to the risk of miss testing for some fine leak components.Besides,for the ceramic packages with large cavity volume,helium bombing at the minimum pressure of 310 kPa for fixed methods may lead to the lid deflection,seal damage,etc.The difference of the equivalent standard leak rates between fix methods and flexible methods is analyzed,and the issues on the packages with large cavity during higher pressure of helium bombing,and the method with the lower pressure of helium bombing is also raised.

     

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