石墨烯基薄膜在真空检漏中的潜在应用

Potential Application of Graphene-based Membranes in Vacuum Leak Detection

摘要: 针对超灵敏检漏系统中缺乏与漏率匹配的极小漏率标准漏孔的问题,基于无缺陷石墨烯对气体分子的不渗透性,提出使用石墨烯基薄膜作为漏孔元件新型材料的思路,并对多孔石墨烯薄膜的制备和机械强度进行了讨论,同时介绍了本课题组对氧化石墨烯薄膜渗透性的研究成果,为石墨烯基薄膜作为标准漏孔新型材料提供指导。

Abstract: For the lack of ultra-sensitive leak element,graphene-based membrane as a new type of leak element material is proposed based on the impermeability of defect-free graphene to gas molecules.In this paper,the preparation and mechanical strength of porous graphene membranes are discussed,and the research on the permeability of graphene oxide membranes by our group is introduced,which provides guidance for the graphene-based membrane as a new type of stan-dard leakage material.