转子对磁悬浮转子真空计计量特性的影响研究

The Rotor’s Effects for the Metrological Characteristics of Spinning Rotor Gauge

摘要: 磁悬浮转子真空计是一种精密的黏滞型真空计，其核心部件是一个悬浮在真空中自由旋转的金属球（转子）。通过对不同直径变动量、球形误差、表面粗糙度、材质的转子进行对比实验，研究了转子与磁悬浮转子真空计稳定性、气体种类的相互关系及原因。结果表明，直径变动量为0.13µm、球形误差为0.13µm、粗糙度为0.014µm、直径为4.5 mm的GCr15高碳铬轴承钢材料转子具有最好的零点稳定性及较小的测量不确定度。

Abstract: Spinning Rotor Vacuum Gauge is a precise viscous vacuum gauge.Its core component is a metal ball(rotor)suspended in a vacuum and rotating freely.By comparing the rotors with different diameter variations,spherical error,surface roughness and materials,the interrelationship between the rotors and the stability of vaccum gauge well as gas types and the reasons were investigated.The experimental results show that the GCr15 high carbon chromium steel rotor with a diameter variation of 0.13 μm,spherical error of 0.13 μm,the roughness of 0.014 μm,and a diameter of 4.5 mm has first-class zero-point stability and less measurement uncertainty.