童欣, 邱杰, 李家鹏, 等. 芯片级节流制冷器换热器结构多目标优化研究[J]. 真空与低温, 2022, 28(3): 324-332. DOI: 10.3969/j.issn.1006-7086.2022.03.012
引用本文: 童欣, 邱杰, 李家鹏, 等. 芯片级节流制冷器换热器结构多目标优化研究[J]. 真空与低温, 2022, 28(3): 324-332. DOI: 10.3969/j.issn.1006-7086.2022.03.012
TONG Xin, QIU Jie, LI Jiapeng, et al. Multi-objective Optimization of Heat Exchangers in Microminiature Refrigerator[J]. VACUUM AND CRYOGENICS, 2022, 28(3): 324-332. DOI: 10.3969/j.issn.1006-7086.2022.03.012
Citation: TONG Xin, QIU Jie, LI Jiapeng, et al. Multi-objective Optimization of Heat Exchangers in Microminiature Refrigerator[J]. VACUUM AND CRYOGENICS, 2022, 28(3): 324-332. DOI: 10.3969/j.issn.1006-7086.2022.03.012

芯片级节流制冷器换热器结构多目标优化研究

Multi-objective Optimization of Heat Exchangers in Microminiature Refrigerator

  • 摘要: 芯片级节流制冷器(MMR)在冷却微小元件领域应用广泛,采用材料生长、减薄、键合及光刻刻蚀等微加工技术制成。最小的节流结构尺寸为1 μm。本文对芯片级节流制冷器的最新结构进行了多目标、多结构参数的数值计算优化研究,对制冷器高压侧和低压侧换热器的换热和流动性能进行了优化,数值计算结果与文献中经验关联式吻合良好。计算结果表明:高压侧换热器的努塞尔数Nu较优化前提高了5.8%,摩擦因子f降低了25.7%;低压侧换热器的Nu较优化前提高了14.5%,f降低了2.3%。获得了Nuf随各结构参数的变化规律,为芯片级节流制冷器换热器结构参数和性能优化提供了参考。

     

    Abstract: Microminiature refrigerator(MMR)is wildly used in micro element cooling area.It is fabricated by novel etching,material growing,thinning and bonding technologies.The minimum size of its restriction area can be 1 μm.This paper presents a numerical optimization by employing the multi-objective method to obtain the best structural parameters with the goal of optimizing the MMRs high and low-pressure heat exchangers’heat transfer and pressure performance.The calculation results agree well with correlations in literature.The results showed that compared to the origin model the Nus-selt number Nu is increased by 5.8% and friction factor f is decreased by 25.7% in optimized high-pressure heat exchanger model,as for the optimized low-pressure heat exchanger model the Nu is increased by 14.5% and f is decreased by 2.3%.The patterns of Nu and f change with structural parameters are also obtained.This paper provides a new approach of MMR heat exchangers simulation and offers theoretical reference to the performance optimization.

     

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