10<sup>-9</sup>~10<sup>-1</sup>Pa宽量程电离真空计研制与性能研究

10^-9~10^-1Pa宽量程电离真空计研制与性能研究

摘要: 热阴极电离真空计的压力测量范围可覆盖超高真空、高真空和中低真空，该真空计广泛应用于各类真空装备。依据电离真空计工作原理，对电离真空计的本底干扰离子流I_r⁺进行了理论分析，讨论了气体分子热脱附、软X射线效应、ESD效应等多个因素对I_r⁺的影响，优化了规管尺寸和制备工艺，研制了真空规管，将本底干扰降低到2×10^-9Pa以下，并研制了配套的电控单元，使微弱离子流测量下限达到0.1 pA量级。该宽量程电离真空计产品的实测范围达到1.26×10^-9～6.02×10^-1Pa，灵敏度波动小于±11%。

Abstract: The measurement range of the hot cathode ionization gauge covers the pressure up to ultra-high vacuum.It is widely used in variety of vacuum facilities.According to the principle of ionization gauge,the residual ion current I_r⁺of ionization gauge is theoretically analyzed.Several effects,such as gas molecular thermal desorption,soft X-ray and electron stimulated desorption,are discussed.The gauge structure and preparation process were optimized,and the vacuum gauge was developed.The residual pressure is reduced lower than 2×10^-9Pa.A supporting electronic controller has been developed and built,and the lower limit of the low current measurement reaches 0.1 pA.The range of the ionization vacuum gauge varies from 1.26×10^-9~ 6.02×10^-1Pa,and the sensitivity fluctuation is less than ±11%.