Abstract:
The spinning rotor gauge is an internationally recognized high vacuum transfer standard.It is widely used in aerospace,nuclear industry,semiconductor,high-end equipment manufacturing and other fields because of its excellent metrological characteristics and chemical inertness.In order to realize the independent control of high vacuum measurements,the continuous research of key technologies was conducted.It concludes stable suspension based on permanent magnet,accurate measurement of rotor’s axial displacement,construction of kinetic model of rotor’s rotational speed decay rate and high precision detection.It will lay a foundation for the development of metrological-grade spinning rotor gauge,the international equivalence and traceable measurement in high vacuum range,and the establishment of modern advanced vacuum measurement technology system and vacuum quantity traceability system in China.
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