电容薄膜真空计测量误差修正方法研究

Study on Correction Method of Measurement Error of Capacitive Diaphragm Gauge

摘要: 电容薄膜真空计是利用变极距平行平板电容器间接测量压力的仪器，未经过修正的真空计存在较大的测量误差。对电容薄膜真空计进行了校准试验，研究了测量误差与校准曲线的关系。提出了一种修正电容薄膜真空计测量误差的方法，并与仪器标定通用的修正因子法进行了对比分析。结果表明，该方法对误差曲线的修正作用优于单一修正因子法，能在全量程范围内起修正作用。研究结果为提高电容薄膜真空计的测量精度奠定了技术基础。

Abstract: Capacitive diaphragm gauge(CDG)is an instrument which can measure the vacuum indirectly by means of variable-pitch parallel plate capacitor.The uncorrected CDG has a large measurement error.The relation between the measurement error and the calibration curve was investigated by conducting calibration experiments on CDGs.A method to correct the measurement error was presented and compared with the traditional calibration factor method.The results show that the correction effect of this method is better than that of single correction factor method,and can play a corrective role in the full range.The research results lay the technical foundation for improving the measurement accuracy of CDG.