令晓明, 王瑞, 王伟奇, 等. W-WxN基光热转换薄膜中WOx减反射层的制备及性能研究[J]. 真空与低温, 2022, 28(5): 537-541. DOI: 10.3969/j.issn.1006-7086.2022.05.006
引用本文: 令晓明, 王瑞, 王伟奇, 等. W-WxN基光热转换薄膜中WOx减反射层的制备及性能研究[J]. 真空与低温, 2022, 28(5): 537-541. DOI: 10.3969/j.issn.1006-7086.2022.05.006
LING Xiaoming, WANG Rui, WANG Weiqi, et al. Preparation and Performance of WOx Anti-reflective Layer in W-WxN-Based Photothermal Conversion Films[J]. VACUUM AND CRYOGENICS, 2022, 28(5): 537-541. DOI: 10.3969/j.issn.1006-7086.2022.05.006
Citation: LING Xiaoming, WANG Rui, WANG Weiqi, et al. Preparation and Performance of WOx Anti-reflective Layer in W-WxN-Based Photothermal Conversion Films[J]. VACUUM AND CRYOGENICS, 2022, 28(5): 537-541. DOI: 10.3969/j.issn.1006-7086.2022.05.006

W-WxN基光热转换薄膜中WOx减反射层的制备及性能研究

Preparation and Performance of WOx Anti-reflective Layer in W-WxN-Based Photothermal Conversion Films

  • 摘要: 光热转换薄膜在航空、航天和太阳能可再生能源应用等领域具有广阔的应用前景。为了获得具有高效吸热以及低发射率特点的新型光热薄膜材料,利用中频反应磁控溅射方法,在制备W/W-WxN(H)/W-WxN(L)/WxN光热转换薄膜的基础上,引入WOx作为新型光热转换薄膜的减反射层,以期改善光热转换薄膜的吸收性能。讨论和比较了不同样品的光学性能、表面形态、结构信息以及化学成分。结果表明:WOx减反射层包含多种钨的氧化物,呈现非晶态致密结构;新型光热转换薄膜吸收发射比为0.90/0.089,具有高效的光热性能。

     

    Abstract: Photo thermal conversion films have promising applications in the fields of aviation,aerospace and solar renewable energy applications.In oder to prepare a new photothermal film materials with high efficiency solar absorption and low emissivity,the medium frequency reactive magnetron sputtering deposition method was used to improve the absorption performance of the photothermal film by introducing WOx as the anti-reflection layer of the new photothermal film on the basis of preparing W/W-WxN (H) /W-WxN (L) photothermal conversion film.The optical properties,surface morphology,structural information and chemical composition are discussed in this parer.The experimental results show that the WOx anti-reflective layer contains various oxides of tungsten and exhibits an amorphous dense structure,and that this new photothermal conversion film has highly efficient photothermal performance parameters with an absorbance to emissivity ratio of 0.90/0.089.

     

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