龙伟, 赵肆方, 杨才华, 等. 一种双密封结构稳定漏率判定方法[J]. 真空与低温, 2022, 28(6): 705-712. DOI: 10.3969/j.issn.1006-7086.2022.06.012
引用本文: 龙伟, 赵肆方, 杨才华, 等. 一种双密封结构稳定漏率判定方法[J]. 真空与低温, 2022, 28(6): 705-712. DOI: 10.3969/j.issn.1006-7086.2022.06.012
LONG Wei, ZHAO Sifang, YANG Caihua, et al. A Method for Determining Steady Leakage Rate of Double Sealed Structure[J]. VACUUM AND CRYOGENICS, 2022, 28(6): 705-712. DOI: 10.3969/j.issn.1006-7086.2022.06.012
Citation: LONG Wei, ZHAO Sifang, YANG Caihua, et al. A Method for Determining Steady Leakage Rate of Double Sealed Structure[J]. VACUUM AND CRYOGENICS, 2022, 28(6): 705-712. DOI: 10.3969/j.issn.1006-7086.2022.06.012

一种双密封结构稳定漏率判定方法

A Method for Determining Steady Leakage Rate of Double Sealed Structure

  • 摘要: 使用氦质谱法检测双密封结构产品漏率时,示漏气体漏率示值稳定时间较长,检漏效率较低。针对此问题,建立了双密封结构泄漏模型,对检漏曲线进行了分析。在此基础上提出了一种基于指数函数拟合的稳定漏率判定方法,对10-6~10-8Pa·m3/s范围内3条不同量级的漏率曲线进行了拟合分析。结果表明,该方法能有效解决稳定漏率判定难题,提高检漏效率。

     

    Abstract: When helium mass spectrometry is used to detect the leakage rate of double sealed structure products,the stability time of leakage rate is long,and the detection efficiency is low.To solve this problem,a leakage model of double sealed structure is established,and the leakage curve is analyzed.On this basis,a stable leakage rate determination method based on exponential function fitting is proposed,and three leakage curves of different magnitudes from 10-6to 10-8Pa·m3/s are fitted and analyzed.The results show that the method can effectively solve the problem of stable leakage rate determination and improve the efficiency of leakage detection.

     

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