毛细管型真空漏孔及其计量特性研究

Study on Capillary Vacuum Leak and its Metrological Characteristics

摘要: 自主研制了毛细管型真空漏孔，介绍了其结构组成。对该漏孔的温度特性、年衰减率、重复性及稳定性进行了实验研究。结果表明，该漏孔的温度系数小于1.0%，年衰减率小于1.0%，重复性小于0.3%，采用氦质谱检漏仪实际使用12 h稳定性小于1.0%。研制的毛细管型真空漏孔在真空检漏中具有广泛应用前景。

Abstract: The capillary vacuum leak was developed,and its structural composition was described in detail.The temperature characteristics,annual decay rate,repeatability and stability of the leak were studied experimentally.The results show that the temperature coefficient of the leak is less than 1.0%,the annual decay rate is smaller than 1.0%,the repeatability is less than 0.3%,and the stability is less than 1.0% in 12 hours by using helium mass spectrometer leak detector.The developed capillary leak is widely used in vacuum leak detection.