贺赐龙, 钟美鹏, 胡旭晓, 等. 基于玻璃管密封技术的碱金属蒸发源研究[J]. 真空与低温, 2023, 29(2): 129-136. DOI: 10.3969/j.issn.1006-7086.2023.02.005
引用本文: 贺赐龙, 钟美鹏, 胡旭晓, 等. 基于玻璃管密封技术的碱金属蒸发源研究[J]. 真空与低温, 2023, 29(2): 129-136. DOI: 10.3969/j.issn.1006-7086.2023.02.005
HE Cilong, ZHONG Meipeng, HU Xuxiao, et al. Research on Alkali Metal Evaporation Source Based on Glass Tube Sealing Technology[J]. VACUUM AND CRYOGENICS, 2023, 29(2): 129-136. DOI: 10.3969/j.issn.1006-7086.2023.02.005
Citation: HE Cilong, ZHONG Meipeng, HU Xuxiao, et al. Research on Alkali Metal Evaporation Source Based on Glass Tube Sealing Technology[J]. VACUUM AND CRYOGENICS, 2023, 29(2): 129-136. DOI: 10.3969/j.issn.1006-7086.2023.02.005

基于玻璃管密封技术的碱金属蒸发源研究

Research on Alkali Metal Evaporation Source Based on Glass Tube Sealing Technology

  • 摘要: 碱金属掺杂对分子束外延生长的半导体材料有着非常重要的作用。现有的碱金属蒸发源以碱金属释放剂为原材料,蒸发的碱金属量较少,不能满足半导体材料外延生长过程中多次掺杂对碱金属量的需求,因此,自主研究开发了一种通过玻璃管密封碱金属单质获得大量碱金属的蒸发源,其碱金属质量可达2 g,比现有的碱金属蒸发源的碱金属含量(5 mg)提高了近2个量级。在手套箱中将碱金属单质放置在开口处带有球阀的玻璃管内,取出后连接真空泵组抽气处理,再将玻璃管旋转加热完成拉丝密封。封装后的玻璃管放置在蒸发源内部,使用时旋转挡板击碎玻璃管口进行蒸发镀膜。该碱金属蒸发源主要由原材料放置组件、灯丝加热组件、旋转挡板组件和电源控温组件等组成。对加热电源的电路进行非线性整定的PID控制,实现了5 min内将蒸发源的温度误差控制在±0.1 K以内的目标,稳定的温度可以提高分子束束流的稳定性,从而提高分子束外延膜的均匀性。试验证明,碱金属蒸发源可以蒸镀出碱金属,非线性整定PID调节器可以满足分子束外延生长对蒸发源控温精度的要求。

     

    Abstract: Alkali metal doping plays an important role in molecular beam epitaxy of semiconductor materials. The existing alkali metal evaporation source uses alkali metal release agent as raw material, and the amount of alkali metal obtained by evaporation is small. Therefore, an evaporation source for obtaining a large amount of alkali metal by sealing alkali metal elements with glass tubes was independently developed, the amount of alkali metal evaperation can reach 2 g, much higher alkali content than existing evaporation sources(5 mg). In the glove box, the alkali metal element is placed in the glass tube with a ball valve at the opening. After take out, it is connected to the vacuum pump group for pumping treatment, and then the glass tube is rotated and heated to complete the drawing seal. The packaged glass tube is placed inside the evaporation source, and when used, the rotating baffle breaks the glass tube orifice for evaporation coating. The alkali metal evaporation source is mainly composed of raw material placement component, filament heating component, rotating baffle component and power supply temperature control component. The nonlinear tuning PID control of the heating power supply circuit achieves the goal of controlling the temperature error of the evaporation source within ± 0.1 K within 5 minutes.Stable temperature can improve the stability of molecular beam current, and thus improve the uniformity of the film. Experiments show that the alkali metal evaporation source can evaporate alkali metal, nonlinear tuning PID regulator can meet the requirements of molecular beam epitaxy growth on evaporation source temperature control accuracy.

     

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