贾东旭, 马国佳, 刘星, 等. 不同过渡层结构对Cr-DLC复合涂层性能影响研究[J]. 真空与低温, 2023, 29(2): 137-145. DOI: 10.3969/j.issn.1006-7086.2023.02.006
引用本文: 贾东旭, 马国佳, 刘星, 等. 不同过渡层结构对Cr-DLC复合涂层性能影响研究[J]. 真空与低温, 2023, 29(2): 137-145. DOI: 10.3969/j.issn.1006-7086.2023.02.006
JIA Dongxu, MA Guojia, LIU Xing, et al. Effect of Different Transition Layer Structures on Cr-DLC Coating Properties[J]. VACUUM AND CRYOGENICS, 2023, 29(2): 137-145. DOI: 10.3969/j.issn.1006-7086.2023.02.006
Citation: JIA Dongxu, MA Guojia, LIU Xing, et al. Effect of Different Transition Layer Structures on Cr-DLC Coating Properties[J]. VACUUM AND CRYOGENICS, 2023, 29(2): 137-145. DOI: 10.3969/j.issn.1006-7086.2023.02.006

不同过渡层结构对Cr-DLC复合涂层性能影响研究

Effect of Different Transition Layer Structures on Cr-DLC Coating Properties

  • 摘要: 为了改善大载荷工况下零件的耐磨损性能,提高其使用寿命,采用阴极真空电弧离子镀和微波等离子体辅助化学气相沉积复合工艺在轴承钢(9Cr18)表面制备了无承载过渡层、(Cr/CrN)x周期承载过渡层和CrN1···CrNx梯度承载过渡层三种结构的Cr-DLC复合涂层。通过拉曼光谱(Raman)和X射线衍射仪(XRD)研究了不同Cr靶电流下Cr-DLC涂层的化学成分和结构,采用扫描电镜(SEM)观察了涂层的微观结构,并采用纳米压痕、显微划痕和摩擦磨损试验对复合涂层的力学性能和摩擦学性能进行了评价。结果表明,Cr掺杂DLC涂层中镶嵌了CrC晶粒,涂层的纳米硬度可达30 GPa以上;带有梯度CrNx承载层的Cr-DLC复合涂层的力学性能和耐磨性能最好,与基底的结合强度可达52 N,磨损率为13.8×10-7mm3/(N·m),是基底材料的1.5%;大载荷摩擦试验表明,有梯度承载层的Cr-DLC涂层在800 N载荷下可保持1 000 s内不被破坏;Falex试验表明,有梯度承载过渡层的Cr-DLC复合涂层的最大承载能力达到5 000 N。

     

    Abstract: In order to improve the wear resistance of the parts under high load condition and prolong their service life, the composite process of cathodic vacuum arc ion plating and microwave plasma-assisted chemical vapor deposition was used to prepare Cr-DLC coatings on bearing steel surface with three transition layers, namely, no load layer, periodic(Cr/CrN) xload layer and CrNx gradient load layer, respectively.Raman spectroscopy and X-ray diffraction(XRD) were used to study the chemical composition and structure of Cr-DLC coatings under different Cr target currents.Scanning electron microscopy (SEM) was used to observe the microstructure of DLC coatings with three kinds of transition layers.The mechanical and tribological properties were evaluated by nano indentation, micro scratch and friction and wear tests.The results show that the Cr-doped DLC coating is a typical a-C:H film, which is embedded with Cr C grains, and its nanohardness can reach more than 30 GPa.The Cr-DLC coating with gradient CrNx load layer has the best mechanical properties and wear resistance, and the strongest load capacity, with a binding strength of 52 N to the substrate material.and a wear rates of 13.8×10-7mm3/(N·m) which is 1.5%that of the substrate material.The high-load friction test shows that Cr-DLC coating with gradient load layer can remain undamaged for 1 000 s under 800 N load, and Falex test shows that maximum load capacity of the coating reaches 5 000 N.

     

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