Abstract: The stress variation of the multi-layer reflection film of LiDAR optics was studied by laser interferometer.And the effects of accelerating voltage of ion source, irradiation angle of ion source, matching of interface layer and substrate, and post-treatment on PV of multilayer films were mainly discussed. The experimental results show that the titanium oxide film exhibits tensile stress under low power ion source, and the compressive stress appears gradually with the increase of ion source power. Adjusting the irradiation angle of the ion source and structure of the interface layer can improve the non-uniformity of the sample profile variations between the center and the edge of the sample plate. On the basis of studies, the deposition processes for mass-production to meet requirements of comprehensive weather resistance were optimized, and the high-reflection multi-layers thin film devices used in LiDAR were mass-produced.