基于碳纳米管电子源的计量级电离真空计数值模拟研究

Numerical Simulation of a Metrological Ionization Vacuum Gauge Based on Carbon Nanotube Electron Source

摘要: 通过控制电离区域内的电子轨迹和电子能量，能够使计量级电离真空计实现高稳定的超高真空测量。设计了一种基于碳纳米管（CNT）电子源的计量级电离真空计，构建了物理模型，模拟计算了电子透过率、电子传输效率和灵敏度等关键参数，并分析了不同的电子发射分布、电极电压和制造安装公差对灵敏度稳定性等关键参数的影响。该真空计的理论计算灵敏度为0.251 7 Pa^-1，标准偏差为7.753 8×10^-5 Pa^-1。

Abstract: The metrological ionization gauge realizes highly stable ultra-high vacuum measurements by controlling both the trajectories of electrons and kinetic energy in the ionization volume.A metrological ionization gauge based on carbon nanotube(CNT) electron source is designed, and a physical model is constructed to simulate the parameters of the electron passing efficiency, the electron transmission efficiency and the sensitivity. The effects of different electron emission distributions, main electrode voltages and fabrication tolerances on the three parameters were also analyzed.The theoretical sensitivity was 0.251 7 Pa^-1 with a standard deviation of 7.753 8×10^-5 Pa^-1.