极高真空电离规的校准实验研究

CALIBRATION OF EXTREMELY HIGH VACUUM IONIZATION GAUGE

摘要: 介绍了2支反磁控型冷阴极极高真空电离规和1支热阴极极高真空电离规的校准实验研究结果。实验设备是一台极高真空校准装置,实验范围为10^-9～10^-1Pa,实验气体为N₂。实验结果表明,尽管2次校准结果的重复性较好,但就单次校准结果来看,每个规的灵敏度（修正因子）的最大值和最小值之间的偏差较大。因此,极高真空电离规要得到准确的测量结果,对其进行精确校准是非常必要的。

Abstract: Two inverted magnetron cold cathode ionization gauges and one hot cathode ionization gauge were calibrated against a（extremely high vacuum） XHV calibration apparatus over the range 10^-9 Pa to 10^-1Pa with gas of N₂.The results showed that all gauges had better repeatability.Nevertheless,as for a whole measurement course,the correction factor and sensitivity were strongly pressure dependent.Therefore,to ensure accurate pressure measurement,it is necessary to calibrate these XHV ionization gauges accurately for reliability of the application in XHV.